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Unified modeling language description of the object-oriented multi-scale adaptive finite element method for step-and-flash imprint lithography simulations
Paszynski, M.; Gurgul, P.; Sieniek, M.; Pardo, D.
(2014-12-31)
(2014-12-31)
In the first part of the paper we present the multi-scale simulation of the Step-and-Flash Imprint Lithography (SFIL), a modern patterning process. The simulation utilizes the hp adaptive Finite Element Method (hp-FEM) ...